• 1: Home
• 2: About Us
  • 2.1: About Adtec Europe
  • 2.2: Global Site
• 3: News
  • 3.1: Adtec News
  • 3.2: Events
• 4: Our Products
  • 4.1: Product Overview
  • 4.2: RF Generators
    • 4.2.1: 200W RF Plasma Generator
    • 4.2.3: 300W Half Rack RF Generator
    • 4.2.4: 600W RF Plasma Generator
    • 4.2.7: 600W Half Rack RF Generator
    • 4.2.9: 1kW Low Frequency RF Generator
    • 4.2.10: 1kW Half Rack RF Generator
    • 4.2.11: 1.5kW Low Frequency
    • 4.2.12: 2kW RF Plasma Generator
    • 4.2.13: 3kW RF Plasma Generator
    • 4.2.14: 3kW Half Rack Generator
    • 4.2.15: 4kW 40MHz RF Generator
    • 4.2.16: 5kW Half Rack RF Generator
    • 4.2.17: 7.5kW RF Plasma Generator
    • 4.2.18: 10kW RF Plasma Generator
    • 4.2.20: 20kW RF Plasma Generator
    • 4.2.20: 15kW RF Plasma Generator
    • 4.2.21: 30kW RF Plasma Generator
  • 4.3: RF Matching Units
  • 4.4: Diagnostics Equipment
    • 4.4.1: AW-8000II Power Tracer
    • 4.4.2: AW-2024 Power Meter
    • 4.4.3: AW Series Power Sensor
    • 4.4.4: Chamber Impedance Analyzer
• 5: Plasma Activities
  • 5.1: Plasma Activities Overview
  • 5.2: What is Plasma
  • 5.3: Plasma Applications
    • 5.3.1: Sterilization / Medical
    • 5.3.2: Surface Treatment
    • 5.3.3: Cleaning
    • 5.3.4: Gas Abatement
• 6: Contact Us
  • 6.1: Adtec Europe
  • 6.2: Head Office
  • 6.3: Adtec USA
  • 6.4: Adtec Agents
• 7: MyAdtec
  • 7.1: AMV Software Download
  • 7.2: RF & Plasma Presentations
• 8: Adtec Support
• 9: Sitemap

Gas Abatement

Wherever possible, use of Perfluorocarbon (PFC) gases like CF4 and C2F6 has been restricted due to their high global warming potential, as much as 50,000 times worse than carbon dioxide. Where no better alternative exists, and their use is unavoidable, the gases must be broken down into less harmful by-products before being released.

One example is the use of PFC gases in semiconductor etch and chamber-cleaning processes. As an alternative to thermally breaking down the exhaust gases from these processes, atmospheric plasma can be used, having the advantage of being a cleaner technology, and not needing special fuels to run.

Adtec equipment supporting this application is the VAW plasma.