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TX-06 600W RF Plasma Generator

  • 2 years warranty
  • low spurious noise
  • Robust, reliable design that can tolerate high reflected power.
  • Can be used with Adtec Impedance Matchers to strike plasma.
  • RoHS Compliant

 

 

The specification below is for the basic version. Click here for list of available options, or contact your local Adtec representative.

Are you looking for the AX-600III or the AX-600III-A?



Model TX-06
Output Power 0 to 600W (50Ω load)
Output settable range 0 to 600W Continuously variable (in 1W steps)Rated Output Power 600W
Output deviation Within ±1% or ±2W of displayed power, which is bigger(Ambient temperature 25°C / 50Ω Load)
Output frequency 13.56MHz
Frequency stability ±0.01% (10 to 40°C) Crystal Oscillator
Output impedance 50Ω ± 2Ω
Output harmonic distortion Each harmonic component within -45dBc of fundamental(At rated power / ambient temperature 25°C / 50Ω Load)
Remote control connection

Analog control (57-type 24pin) female on generatorRS232C control (D-sub 9pin) female on generator

Output connector N-type Receptacle
Cooling method Forced air (airflow: Approx 2.5m3/min)
Power supply Single-phase rated voltage AC200 to 240V 50-60HzLeakage current <5mA/AC200V
Protection features
Dimensions (w)215mm x (d)498mm x (h)145mm, excluding protruding parts
Weight Approx 9kg (20lbs)

 

Optional extras:

  • Variable frequency (for frequency matching etc)
  • Pulsed RF mode
  • Arc handling (including arc count function)
  • External oscillator input / output (for controlling phase difference between two units etc)
  • Alternative control interfaces (Profibus, DeviceNet etc)
  • Alternative interface connectors (24pin Amphenol, 50 pin etc)
  • Alternative frequencies (eg 12.5MHz, 13.55MHz etc)
  • Front panel key-pad and LCD display screen (for manual control/monitoring)
  • Front panel key switch