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TX-03 300W RF Plasma Generator

  • 2 years warranty
  • low spurious noise
  • Robust, reliable design that can tolerate high reflected power.
  • Can be used with Adtec Impedance Matchers to strike plasma.
  • RoHS Compliant


The specification below is for the basic version. Click here for list of available options, or contact your local Adtec representative.

Are you looking for the AX-300III?

Model TX-03
Output Power 0~300W (50W load)
Output settable range 0~300W continuously variable (1W increments). Rated output power is 300W
Output deviation Within +/-1% or +/-2W (whichever is larger) of set power (displayed power) [rated power / 25℃ ambient temperature / 50W load]
Output frequency 13.56MHz
Frequency stability +/-0.01% (10~40℃) crystal oscillator
Output impedance 50Ω ± 2Ω
Output harmonic distortion Each higher harmonic to be -45dBc or less with respect to the fundamental wave. [rated power / 50W load]
Remote control connection

Analogue control (57-type 24Pin), male on unit
RS-232C control (D-Sub 9Pin), female on unit

Output connector N-type Receptacle
Cooling method Forced air (2.0m3/min flow)
Power supply Single phase AC200 - 240V, 50 - 60Hz Leakage current 5mA/AC200V or less) Power connector SUP-J10G-E/OKAYA
Protection features  
Dimensions (w)215mm x (d)498mm x (h)145mm, excluding protruding parts
Weight 7.0kg

 

Optional extras:

  • 0.1W increment output (for finer adjustment of power output)
  • Variable frequency (for frequency matching etc)
  • Pulsed RF mode
  • Arc handling (including arc count function)
  • External oscillator input / output (for controlling phase difference between two units etc)
  • Alternative control interfaces (Profibus, DeviceNet etc)
  • Alternative interface connectors (24pin Amphenol, 50 pin etc)
  • Alternative frequencies (eg 12.5MHz, 13.55MHz etc)
  • Front panel key-pad and LCD display screen (for manual control/monitoring)
  • Front panel key switch