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TX-20 2kW 13.56MHz RF Generator

  • 2 years warranty
  • low spurious noise
  • Robust, reliable design that can tolerate high reflected power.
  • Can be used with Adtec Impedance Matchers to strike plasma.
  • RoHS Compliant

 

The specification below is for the basic version. Click here for list of available options, or contact your local Adtec representative.

Are you looking for the AX-2000III?



Model TX-20
Output Power 0 ~ 2000W (into a 50W load)
Output settable range 0 ~ 2000W (in 1W increments), rated power = 2000W
Output deviation Within ±1%Set Value(Display power) or ±2W whichever is larger (Ambient temperature 25°C/50Ω Load)
Output frequency 13.56MHz
Frequency stability ±0.01%(10~40°C)Crystal oscillation
Output impedance 50Ω ± 2Ω
Output harmonic distortion Under -45dB (rated power / 25℃ / 50-W load)
Remote control connection

Analog Control(57-type 24pin)female

RS-232CControl(D-Sub 9pin)female
Output connector HN-type Receptacle
Cooling method Forced air (Fan air flow = 3m3/min)
Power supply 3 phase AC200-240V 50-60Hz Leakage current < 5mA/AC200V Power Connector(JL04HV-2E22-22PE-B-R/JAE)
Protection features
Dimensions (w)215mm x (d)498mm x (h)145mm, excluding protruding parts
Weight 21kg approx

 

Optional extras:

  • Variable frequency (for frequency matching etc)
  • Pulsed RF mode
  • Arc handling (including arc count function)
  • External oscillator input / output (for controlling phase difference between two units etc)
  • Alternative control interfaces (Profibus, DeviceNet etc)
  • Alternative interface connectors (24pin Amphenol, 50 pin etc)
  • Alternative frequencies (eg 12.5MHz, 13.55MHz etc)
  • Front panel key-pad and LCD display screen (for manual control/monitoring)
  • Front panel key switch