AX-200III-A - 200W 13.56MHz RF Generator (Half Rack Size)
- 2 years warranty
- Low spurious noise
- Robust, reliable design that can tolerate high reflected power.
- Can be used with Adtec Impedance Matchers to strike plasma.
All our 13.56MHz Frequency Generators can also be ordered in 12.5MHz or 14MHz versions. Please contact us for more information.
| Model | AX-200III-A |
| Output power | 200W |
| Output settable range | 0 - 210W (0.1W increments) |
| Output deviation | Within 0.5W of displayed power |
| Output frequency | 13.56MHz |
| Frequency stability | ±0.01% (10℃ - 40℃) |
| Output impedance | 50Ω ± 2Ω |
| Output harmonic distortion | Less than -45dB of fundamental wave |
| Remote control connection | Analog / RS-232C |
| Output connector | N-type Receptacle |
| Cooling method | Forced Air |
| Power supply | Single phase, 50~60Hz, 200~240V, 880VA |
| Protection features | |
| Dimensions | W 215 × D 485 × H 177 mm (excluding protruding parts) |
| Weight | about 20kg |
| Options |
External Input |
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