English Deutsch

Print this page

TX-10 1kW 13.56MHz RF Generator

  • 2 years warranty
  • low spurious noise
  • Robust, reliable design that can tolerate high reflected power.
  • Can be used with Adtec Impedance Matchers to strike plasma.
  • RoHS Compliant

 

The specification below is for the basic version. Click here for list of available options, or contact your local Adtec representative.

Are you looking for the AX-1000III?



Model TX-10
Output Power 0 ~ 1000W (into a 50W load)
Output settable range 0 ~ 1000W (in 1W increments), rated power = 1000W
Output deviation Within +/-1% or +/-2W (whichever is larger) of set power (displayed power) (rated power / 25℃ / 50-W load)
Output frequency 13.56MHz
Frequency stability +/- 0.01% (10 ~ 40℃) crystal oscillator
Output impedance 50Ω ± 2Ω
Output harmonic distortion Under -45dB (rated power / 25℃ / 50-W load)
Remote control connection

Analogue control, 57-type 24 pin, male on product

RS-232C control, D-Sub 9-pin, female on product
Output connector N-type Receptacle
Cooling method Forced air (Fan air flow = 3m3/min)
Power supply Single phase, AC 200~240V, 50~60Hz Leakage current less than 5mA/AC200V Connector, (JL04V-2E18-10PE-B-R) JAE
Protection features  
Dimensions (w)215mm x (d)498mm x (h)145mm, excluding protruding parts
Weight 13kg approx

 

Optional extras:

  • Variable frequency (for frequency matching etc)
  • Pulsed RF mode
  • Arc handling (including arc count function)
  • External oscillator input / output (for controlling phase difference between two units etc)
  • Alternative control interfaces (Profibus, DeviceNet etc)
  • Alternative interface connectors (24pin Amphenol, 50 pin etc)
  • Alternative frequencies (eg 12.5MHz, 13.55MHz etc)
  • Front panel key-pad and LCD display screen (for manual control/monitoring)
  • Front panel key switch