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AX-1000III - 1kW 13.56MHz RF Generator

  • 2 years warranty
  • Low spurious noise
  • Robust, reliable design that can tolerate high reflected power.
  • Can be used with Adtec Impedance Matchers to strike plasma.


All our 13.56MHz Frequency Generators can also be ordered in 12.5MHz or 14MHz versions. Please contact us for more information.

Model AX-1000III
Output power 1000W
Output settable range (1W increments) at 50Ω
Output deviation ±0.5% of Set Value or 2W(whichever is larger) at 25℃
Output frequency 13.56MHz
Frequency stability ±0.01% (10℃ - 40℃)
Output impedance 50Ω ± 2Ω
Output harmonic distortion Less than -50dB of fundamental wave
Remote control connection
Output connector N-type Receptacle
Cooling method Forced Air
Power supply 3Ф,3wire 50/60Hz, 200/220V, 2.0kVA
Protection features Reflected power level+time / Reflected power limit / Current value+time / Current limit / Amp temperature / Power transformer temperature / Reflected power control
Dimensions W 430 × D 500 × H 132.5 mm
Weight about 36kg