TS-10 10kW RF Plasma Generator
- 2 years warranty
- low spurious noise
- Robust, reliable design that can tolerate high reflected power.
- Can be used with Adtec Impedance Matchers to strike plasma.
- RoHS Compliant
- Arc Handling
The specification below is for the basic version. Click here for list of available options, or contact your local Adtec representative.
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| Model | TS-10 |
| Output Power | 10000W (50 Ohm load) |
| Output settable range | 100W～10000W (10W increments） |
| Output deviation | Within ±1% of set power or +/- 10W whichever is greater （ambient temperature 25℃, 50Ω load） |
| Output frequency | 13.56MHz |
| Frequency stability | ±0.01%（10～40℃）crystal oscillator |
| Output impedance | 50Ω ± 2Ω |
| Output harmonic distortion | less than -50dB relative to fundamental （ambient temperature 25℃/50Ω load） |
| Remote control connection |
Analogue control |
| Output connector | LC type |
| Cooling method | Forced air and water cooling, 8l/min |
| Power supply | 3-phase AC200～240V or AC380-480V 50-60Hz leakage current 5mA/AC200V or less |
| Protection features | |
| Dimensions | (W)430mm×(D)700mm×(H)221mm |
| Weight | 70kg |
Optional extras:
- Pulsed RF mode
- External oscillator input / output (for controlling phase difference between two units etc)
- Alternative control interfaces (Profibus, DeviceNet etc)
- Front panel key-pad and LCD display screen (for manual control/monitoring)
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