HF Anpassungsnetzwerke
Extensive access to matching parameters and real-time diagnostics via our unique AMV software adds to the sturdy yet nimble AMV-series design that features vacuum capacitors, CPU control and micro-stepping motors. The modular design means networks can be optimised to any chamber design giving ultimate performance and control. Data captured with the AMV software can easily be shared with colleagues, allows the user to compare chamber condition over time and enables the user to visualize their process.
Adtec AMV Series Visual Matching Units
- Internal LC network basic library(reverseL,π,ICP)
- Alarm ranges can be set to generate messages to allow problems to be diagnosed before they occur
- Real time measurement function that can be used for tool development or maintenance
- Normal matching occurs without having the monitor connected
- Forward and reflected power trace displayed on graph
- Chamber impedance shown on a Smith Chart format (alarm function included)
Example Screen:
Connection Diagram:
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