AX-7500W - 7,5kW 13,56MHz HF Generator
- * intended for 12 "wafer process tool, LCD plasma tool
- Robust, reliable design for HDP(such as ICP, Helicon, Hilical) applications that can be tolerate a high level of reflected power.
- RS-232C Interface
- 2 Jahre Garantie
| Model | AX-7500W |
| Output power | 7.5kW |
| Output settable range | (5W increments) at 50Ω |
| Output deviation | ±1% of Set Value or 15W(whichever is larger) at 25℃ |
| Output frequency | 13.56MHz |
| Frequency stability | ±0.01% (10℃ - 40℃) |
| Output impedance | 50Ω ± 2Ω |
| Output harmonic distortion | Less than -50dB of fundamental wave |
| Remote control connection | |
| Output connector | 7/16 DIN Receptacle |
| Cooling method | |
| Power supply | 3Ф, 3wire, 50/60Hz, 200/220V, 11kVA |
| Protection features | Reflected power level+time / Reflected power limit / Current value+time / Current limit / Amp temperature / Power Transformer temperature / Reflected power control |
| Dimensions | W 550 × D 750 × H 706 mm |
| Weight | about 245kg |
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