AX-600III - 600W 13,56MHz HF Generator
- 2 years warranty
- Low spurious noise
- Robust, reliable design that can tolerate high reflected power.
- Can be used with Adtec Impedance Matchers to strike plasma.
| Model | AX-600III |
| Output power | 600W |
| Output settable range | 0 - 600W (1W increments) at Ω |
| Output deviation | ±1％ of Set Value or 3W(whichever is larger) at 25℃ |
| Output frequency | 13.56MHz |
| Frequency stability | ±0.01% (10℃ - 40℃) |
| Output impedance | 50Ω ± 2Ω |
| Output harmonic distortion | Less than -45dB of fundamental wave |
| Remote control connection | |
| Output connector | N-type Receptacle |
| Cooling method | Forced Air |
| Power supply | Single phase, 50/60Hz, 200/220V, 1.5kVA |
| Protection features | |
| Dimensions | W 430 × D 500 × H 132 mm (excluding protruding parts) |
| Weight | about 25kg |
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