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AX-600III - 600W 13,56MHz HF Generator

  • 2 years warranty
  • Low spurious noise
  • Robust, reliable design that can tolerate high reflected power.
  • Can be used with Adtec Impedance Matchers to strike plasma.

Model AX-600III
Output power 600W
Output settable range 0 - 600W (1W increments) at Ω
Output deviation ±1% of Set Value or 3W(whichever is larger) at 25℃
Output frequency 13.56MHz
Frequency stability ±0.01% (10℃ - 40℃)
Output impedance 50Ω ± 2Ω
Output harmonic distortion Less than -45dB of fundamental wave
Remote control connection
Output connector N-type Receptacle
Cooling method Forced Air
Power supply Single phase, 50/60Hz, 200/220V, 1.5kVA
Protection features
Dimensions W 430 × D 500 × H 132 mm (excluding protruding parts)
Weight about 25kg