AX-600III-A - 600W 13,56MHz HF Generator (Half Rack Size)
- 2 Jahre Garantie
- Low spurious noise
- Robust, reliable design that can tolerate high reflected power.
- Can be used with Adtec Impedance Matchers to strike plasma.
| Model | AX-600III-A |
| Output power | 600W |
| Output settable range | 0 - 610W (1W increments) |
| Output deviation | ±1％ of Set Value or 3W(whichever is larger) at 25℃ |
| Output frequency | 13.56MHz |
| Frequency stability | ±0.01% (10℃ - 40℃) |
| Output impedance | 50Ω ± 2Ω |
| Output harmonic distortion | Less than -45dB of fundamental wave |
| Remote control connection | Analog / RS-232C |
| Output connector | N-type Receptacle |
| Cooling method | Forced Air |
| Power supply | Single phase, 50~60Hz, 200~240V, 1.3kVA |
| Protection features | |
| Dimensions | W 215 × D 485 × H 177 mm (excluding protruding parts) |
| Weight | about 20kg |
| Options |
Pulse External Input, External Output (For Master/Slave operation) RS-485 Interface |
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