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AX-300III 13,56MHz HF Plasma Generator



  • 2 Jahre Garantie
  • low spurious noise
  • Robust, reliable design that can tolerate high reflected power.
  • Can be used with Adtec Impedance Matchers to strike plasma.






Model AX-300III
Output Power 300W
Output settable range (1W increments) at 50Ω
Output deviation ±1% of Set Value or 2W(whichever is larger) at 25℃
Output frequency 13.56MHz
Frequency stability ±0.01% (10℃ - 40℃)
Output impedance 50Ω ± 2Ω
Output harmonic distortion Less than -50dB of fundamental wave
Remote control connection
Output connector N-type Receptacle
Cooling method Forced Air
Power supply Single phase, 50/60Hz, 200/220V, 0.9kVA
Protection features
Dimensions W 430 × D 370 × H 132 mm (excluding protruding parts)
Weight about 11kg