TS-20 20kW HF Plasma Generator
- 2 years warranty
- low spurious noise
- Robust, reliable design that can tolerate high reflected power.
- Can be used with Adtec Impedance Matchers to strike plasma.
- RoHS Compliant
- Arc Handling
The specification below is for the basic version. Click here for list of available options, or contact your local Adtec representative.
Are you looking for the AX-20000W?
| Model | TS-20 |
| Output Power | 20000W (50 Ohm load) |
| Output settable range | 200W～20000W (50W increments） |
| Output deviation | Within ±1% of set power or +/- 10W whichever is greater （ambient temperature 25℃, 50Ω load） |
| Output frequency | 13.56MHz |
| Frequency stability | ±0.005% |
| Output impedance | 50Ω |
| Output harmonic distortion | less than -50dB relative to fundamental |
| Remote control connection |
ROFIBUS: D-sub 9 pin , female, inch-screw |
| Output connector | EIA 1 5/8" |
| Cooling method | Forced air and water cooling, 12l/min |
| Power supply | Three Phase 380~480V, 50~60Hz Leakage current less than 4.4mA |
| Protection features | |
| Dimensions | 440mm(w) x 650mm(d) x 310mm(h) |
| Weight | 90kg |
Optional extras:
- Pulsed RF mode
- External oscillator input / output (for controlling phase difference between two units etc)
- Alternative control interfaces (Profibus, DeviceNet etc)
- Front panel key-pad and LCD display screen (for manual control/monitoring)
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